Abstract

Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.

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History
Original Manuscript: June 12, 2009
Manuscript Accepted: July 25, 2009
Revised Manuscript: July 24, 2009
Published: September 25, 2009

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Author Affiliations

David Pietroy, Olivier Parriaux

Laboratoire Hubert Curien, CNRS-UMR 5516, 18 rue Benoit Lauras, 42000 Saint-Etienne, France

Jean-Louis Stehle

SOPRA SA, 26, rue Joigneaux,92270 Bois Colombes, France

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