Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis
Optics Letters, Vol. 33, Issue 17, pp. 1990-1992 doi:10.1364/OL.33.001990
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- OCIS Codes:
- (100.6640) Image processing : Superresolution
- (120.3940) Instrumentation, measurement, and metrology : Metrology
- (120.4630) Instrumentation, measurement, and metrology : Optical inspection
- (180.5810) Microscopy : Scanning microscopy
- (150.1835) Machine vision : Defect understanding
- (150.5495) Machine vision : Process monitoring and control
Instrumentation, Measurement, and Metrology
Citation
Ravikiran Attota, Thomas A. Germer, and Richard M. Silver, "Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis," Opt. Lett. 33, 1990-1992 (2008)
http://www.opticsinfobase.org/abstract.cfm?URI=ol-33-17-1990
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We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
© 2008 Optical Society of America
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History
Original Manuscript: May 30, 2008
Manuscript Accepted: June 23, 2008
Published: August 27, 2008
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