Abstract
Three autocollimation-type ellipsometers (ACE) are proposed for in situ study or monitoring of film growth through a single window of a vacuum chamber. An example of the monitoring is given; the growth of a Corning 7059 glass film is monitored during rf sputtering using one of the ACE that is able to process monitor directly the thickness of a transparent film.
© 1976 Optical Society of America
Full Article | PDF ArticleMore Like This
T. Yamaguchi and H. Takahashi
Appl. Opt. 14(8) 2010-2015 (1975)
E. Masetti, M. Montecchi, R. Larciprete, and S. Cozzi
Appl. Opt. 35(28) 5626-5629 (1996)
Lionel R. Watkins and Sophie S. Shamailov
Appl. Opt. 49(16) 3231-3234 (2010)