Abstract

A simple method of determining thin film parameters from mode indices measured using a prism coupler is described. The problem is reduced to doing two least squares straight line fits through measured mode indices vs effective mode number. The slope and y intercept of the line are simply related to the thickness and refractive index of film, respectively. The approach takes into account the correlation between as well as the uncertainty in the individual measurements from all sources of error to give precise error tolerances on the best fit values. Due to the precision of the tolerances, anisotropic films can be identified and characterized.

© 1981 Optical Society of America

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