Karl H. Guenther, Peter G. Wierer, and Jean M. Bennett, "Surface roughness measurements of low-scatter mirrors and roughness standards," Appl. Opt. 23, 3820-3836 (1984)
The surface roughness of low-scatter mirrors and roughness standards can be measured in various ways: mechanically, optically, and electronoptically. In this paper several useful methods and instruments—total integrated scattering, stylus profilometer, optical heterodyne profilometer, variable angle scatterometer, and electron mirror interference microscope—are presented. Qualitative surface roughness assessment is provided by Nomarski microscopy and transmission electron microscopy of surface replicas. Samples were prepared at Balzers, and their surface roughness was measured at several laboratories using the methods given above. The results of these measurements are compared, and reasons for the differences are discussed.
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Parameters, remarks and references in parentheses refer to work not performed in this study.
Table II
Comparison of rms Roughnesses as Measured by Total Integrated Scattering, Optical Heterodyne Profilometer, and Electron Mirror Interference Microscope; All Values are in Nanometers
Uncoated substrate.
Multilayer dielectric coating.
Aluminum on multilayer dielectric coating.
Aluminum coating.
Measured after ultrasonic cleaning following by overcoating with aluminum.
Tables (3)
Table I
Surface Characterization Methods used for Roughness Assessment of Smooth Optical Surfaces and Coatings
Parameters, remarks and references in parentheses refer to work not performed in this study.
Table II
Comparison of rms Roughnesses as Measured by Total Integrated Scattering, Optical Heterodyne Profilometer, and Electron Mirror Interference Microscope; All Values are in Nanometers
Uncoated substrate.
Multilayer dielectric coating.
Aluminum on multilayer dielectric coating.
Aluminum coating.
Measured after ultrasonic cleaning following by overcoating with aluminum.