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Application of an argon-fluoride laser system to the generation of VUV radiation by stimulated Raman scattering

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Abstract

An ArF* oscillator–amplifier combination yielding 60 mJ at 193 nm with good beam divergence (<0.5 mrad) generates VUV radiation down to 146 nm by SRS in H2 gas. Four anti-Stokes and seven Stokes components are identified. VUV power amounts to several kilowatts.

© 1984 Optical Society of America

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