Abstract
A method is proposed for processing ellipsometric data, leading to strict decoupling of the system describing the optical response of a transparent film deposited on a thick opaque substrate. The method is very efficient and enables a thorough semianalytical discussion of the errors involved in the measurements. In particular, resonant errors as well as optimum incidence angles are systematically derived from the formalism.
© 1985 Optical Society of America
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D. Chariot and A. Maruani, "Ellipsometric data processing: an efficient method and an analysis of the relative errors; erratum," Appl. Opt. 26, 1167-1167 (1987)https://opg.optica.org/ao/abstract.cfm?uri=ao-26-7-1167
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