Abstract

Thin films of boron and silicon have been developed using electron beam deposition. The transmissions of these filters were measured from soft x-ray wavelengths to the far ultraviolet and at optical wavelengths. The boron filter transmission peaks near 66 Å and the silicon filter peaks near 136 Å as expected on theoretical grounds, but the extreme ultraviolet bandpass is narrower than expected. The peak transmission of these filters does not change with time, but the width of the silicon filter bandpass is reduced slightly as the filter ages.

© 1985 Optical Society of America

Electron-beam deposited boron coatings for the extreme ultraviolet

Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert
Appl. Opt. 47(16) 2926-2930 (2008)

Extreme-ultraviolet thin-film interference in an Al-Mg-Al multiple-layer transmission filter

John F. Seely
Appl. Opt. 41(28) 5979-5983 (2002)

Amorphous silicon carbide coatings for extreme ultraviolet optics

J. B. Kortright and David L. Windt
Appl. Opt. 27(14) 2841-2846 (1988)

Extreme Ultraviolet Explorer spectrometer

Michael C. Hettrick, Stuart Bowyer, Roger F. Malina, Christopher Martin, and Stanley Mrowka
Appl. Opt. 24(12) 1737-1756 (1985)

Thin Films and Their Uses for the Extreme Ultraviolet

W. R. Hunter, D. W. Angel, and R. Tousey
Appl. Opt. 4(8) 891-898 (1965)