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Investigation of a laser-produced plasma VUV light source

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Abstract

An investigation was conducted on the VUV radiation from laser-produced plasmas using a channel electron multiplier detector and a 1.5-m grazing incidence spectrometer. High-resolution quantitative spectra from 8 to 40 nm were obtained from the plasmas generated by a 0.5-J Nd:YAG laser focused on nine different target materials. The effects on the plasma emission of laser energy and focus were measured.

© 1986 Optical Society of America

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