Abstract

Rectangular-apertured micro-Fresnel lens arrays are proposed. These lens arrays have been fabricated by an electron-beam writing system specially developed for the fabrication of microoptical devices. It is experimentally demonstrated that the lens arrays showed uniform focusing characteristics, and that each lens exhibited a diffraction-limited focusing characteristic with efficiency of 74%.

© 1987 Optical Society of America

Reflection micro-Fresnel lenses and their use in an integrated focus sensor

Teruhiro Shiono, Masatoshi Kitagawa, Kentaro Setsune, and Tsuneo Mitsuyu
Appl. Opt. 28(16) 3434-3442 (1989)

High-performance micro-Fresnel lens fabricated by UV lithography

K. Tatsumi, T. Saheki, T. Takei, and K. Nukui
Appl. Opt. 23(11) 1742-1744 (1984)

Diffraction-limited blazed reflection diffractive microlenses for oblique incidence fabricated by electron-beam lithography

Teruhiro Shiono and Hisahito Ogawa
Appl. Opt. 30(25) 3643-3649 (1991)

Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakahayashi, and Hiroshi Nishihara
Appl. Opt. 29(34) 5120-5126 (1990)

Wavelength-independent integrated focus sensor using a reflection twin micro-Fresnel lens

Teruhiro Shiono and Kentaro Setsune
Appl. Opt. 28(23) 5115-5121 (1989)