Abstract
We propose a sinusoidal phase modulating (SPM) interferometer for displacement measurement. The displacement is obtained by processing the detected signal with a microcomputer. The optical configuration of the SPM interferometer is simple because an optical fiber is effectively used to produce sinusoidal phase modulation. The movements of a piezoelectric transducer and the surface profile of a diamond-turned aluminum disk are measured with high accuracy (a few nanometers).
© 1988 Optical Society of America
Full Article | PDF ArticleMore Like This
Osami Sasaki, Toshiaki Okamura, and Takanori Nakamura
Appl. Opt. 29(4) 512-515 (1990)
Bofan Wang, Xiangzhao Wang, Osami Sasaki, and Zhongliang Li
Appl. Opt. 51(12) 1939-1944 (2012)
Osami Sasaki, Hirokazu Okazaki, and Makoto Sakai
Appl. Opt. 26(6) 1089-1093 (1987)