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Phase shifting interferometry in the presence of vibration: a new algorithm and system

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Abstract

A modification to the usual phase shifting interferometry algorithm permits measurements to be taken fast enough to essentially freeze out vibrations. Only two interferograms are time critical in this 2 + 1 algorithm; the third is null. The implemented system acquires the two time critical interferograms with a 1-millisecond separation on either side of the interline transfer of a standard CCD video camera, resulting in a reduction in sensitivity to vibration of 1–2 orders of magnitude. The required phase shift is achieved via frequency shifting. Laboratory tests comparing this system with a commercial phase shifting package reveal comparable rms errors when vibrations are low; as expected from an analysis of potential phase errors. However, the 2 + 1 system also succeeded when vibrations were large enough to wash out video rate fringes.

© 1990 Optical Society of America

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