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Long-term stability of a Mo/Si multilayer structure

T. W. Barbee, J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, and J. F. Seely

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Abstract

The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 Å, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.

© 1993 Optical Society of America

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