Abstract

CeO_xF_y, films were made by reactive rf magnetron sputtering of Ce in Ar + O₂ + CF₄. Stoichiometries between CeO₂ and CeO_1.0F_1.3 were obtained when the CF₄ content lay between 0% and 9%. For wavelengths λ of >0.4 μm, the films were almost nonabsorbing, and the refractive index at λ = 0.55 μm went from 2.32 for CeO₂ to 1.62 at 9% CF₄. At λ < 0.4 μm and <4% CF₄, the optical properties were consistent with an indirect band gap at 3.1–3.2 eV. CeO₂ films could serve as intercalation hosts for Li⁺ ions.

© 1993 Optical Society of America

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