Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Soft-x-ray projection lithography experiments using Schwarzschild imaging optics

Not Accessible

Your library or personal account may give you access

Abstract

Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.

© 1993 Optical Society of America

Full Article  |  PDF Article
More Like This
Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography

Gary E. Sommargren and Lynn G. Seppala
Appl. Opt. 32(34) 6938-6944 (1993)

Physical optics modeling in soft-x-ray projection lithography

William C. Sweatt and George N. Lawrence
Appl. Opt. 32(34) 6945-6951 (1993)

Multilayer mirror technology for soft-x-ray projection lithography

D. G. Stearns, R. S. Rosen, and S. P. Vernon
Appl. Opt. 32(34) 6952-6960 (1993)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved