Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Surface finish requirements for soft x-ray mirrors

Not Accessible

Your library or personal account may give you access

Abstract

We have examined the correlations between direct surface-finish metrology techniques and normal-incidence, soft x-ray reflectance measurements of highly polished x-ray multilayer mirrors. We find that, to maintain high reflectance, the rms surface roughness of these mirrors must be less than ~1 Å over the range of spatial frequencies extending approximately from 1 to 100 μm−1 (i.e., spatial wavelengths from 1 μm to 10 nm). This range of spatial frequencies is accessible directly only through scanning-probe metrology. Because the surface-finish Fourier spectrum of such highly polished mirrors is described approximately by an inverse power law (unlike a conventional surface), bandwidth-limited rms roughness values measured with instruments that are sensitive to only lower spatial frequencies (i.e., optical or stylus profileres) are generally uncorrelated with the soft x-ray reflectance and can lead to erroneous conclusions regarding the expected performance of substrates for x-ray mirrors.

© 1994 Optical Society of America

Full Article  |  PDF Article
More Like This
Surface roughness of stainless-steel mirrors for focusing soft x rays

Valeriy V. Yashchuk, Eric M. Gullikson, Malcolm R. Howells, Steve C. Irick, Alastair A. MacDowell, Wayne R. McKinney, Farhad Salmassi, Tony Warwick, James P. Metz, and Thomas W. Tonnessen
Appl. Opt. 45(20) 4833-4842 (2006)

Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors

H.-J. Stock, F. Hamelmann, U. Kleineberg, D. Menke, B. Schmiedeskamp, K. Osterried, K. F. Heidemann, and U. Heinzmann
Appl. Opt. 36(7) 1650-1654 (1997)

Multilayer mirror technology for soft-x-ray projection lithography

D. G. Stearns, R. S. Rosen, and S. P. Vernon
Appl. Opt. 32(34) 6952-6960 (1993)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved