Abstract
We present an overview of the engineering design and empirical performance of four stressed-lap polishing tools developed at the University of Arizona. Descriptions of the electromechanical actuators, servo systems, computer interfacing, and attachment of the lap to the polishing machine are provided. The empirical performance of a representative tool is discussed in terms of accuracy, repeatability, and hysteresis. Finally, we estimate the statistical likelihood of aluminum lap-plate failure through a metal-fatigue analysis for a worst-case stress-cycling situation.
© 1994 Optical Society of America
Full Article | PDF ArticleMore Like This
Min-you Chen, Yong-tao Feng, Yong-jian Wan, Yang Li, and Bin Fan
Appl. Opt. 49(8) 1350-1354 (2010)
Xiao Luo, Ligong Zheng, and Xuejun Zhang
Appl. Opt. 50(5) 782-787 (2011)
Hongshen Zhao, Xiaojin Li, Bin Fan, and Zhige Zeng
Appl. Opt. 54(10) 2658-2664 (2015)