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New calibration method for the determination of the absolute density of CH radicals through laser-induced fluorescence

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Abstract

Laser-induced fluorescence (LIF) was applied at the BX transition of the CH radical to measure the absolute densities of CH radicals in an electron-cyclotron resonance methane plasma. The absolute experimental uncertainty is only approximately 30% as a result of a new calibration procedure. The experimental setup was calibrated through the comparison of the LIF signal of N2 + with that of CH. The absolute N2 + density was derived from the spatially resolved N2 + LIF signal and the line-averaged electron density as measured with microwave interferometry.

© 1995 Optical Society of America

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