Abstract

An analysis procedure for evaluating the refractive index and the thickness of 5−10-μm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in Ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.

© 1996 Optical Society of America

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