Abstract

Fizeau interferograms are evaluated by two-beam phase-stepping algorithms. The sinusoidal intensity profile pattern needed for the application of these algorithms is obtained by low-pass filtering the moiré pattern provided by the superposition of the interferogram onto a Ronchi grid. The phase modulation is performed by the in-plane displacement of the grid by means of a motorized stage. In this research the measurement range of the evaluation method as a function of the maximum derivative of height surfaces is calculated. A spherical surface is measured in different configurations in order to verify the obtained results.

© 1997 Optical Society of America

Fizeau phase-measuring interferometry using the moiré effect

B. V. Dorrío, A. F. Doval, C. López, R. Soto, J. Blanco-García, J. L. Fernández, and M. Pérez-Amor
Appl. Opt. 34(19) 3639-3643 (1995)

Multiplicative moiré two-beam phase-stepping and Fourier-transform methods for the evaluation of multiple-beam Fizeau patterns: a comparison

Benito V. Dorrío, Carlos López, José M. Alén, Javier Bugarín, Antonio Fernández, Angel F. Doval, Jesús Blanco-García, Mariano Pérez-Amor, and José L. Fernández
Appl. Opt. 37(10) 1945-1952 (1998)

Dynamic range of Ronchi test with a phase-shifted sinusoidal grating

K. Hibino, D. I. Farrant, B. K. Ward, and B. F. Oreb
Appl. Opt. 36(25) 6178-6189 (1997)

Thermal-insensitive moiré interferometry

James McKelvie
Opt. Lett. 22(1) 55-57 (1997)

Phase shifting Fizeau interferometry of front and back surfaces of optical flats

Joachim Heil, Tobias Bauer, Stefan Schmax, Thomas Sure, and Joachim Wesner
Appl. Opt. 46(22) 5282-5292 (2007)