Abstract
A systematic method has been proposed to evaluate the complex refractive
indices and thicknesses of dispersive polymer thin films in both visible and
infrared regions. The curve-fitting method has been applied to the measurement
of the film thicknesses and complex refractive indices in the visible and
near-infrared regions. The accuracy of the evaluated film thickness is of the
order of ±0.5%. The presented method is useful for
characterizing the optical properties of polymers whose refractive indices are
near to those of substrates.
© 1997 Optical Society of America
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