Abstract
We describe a high-precision angle sensor and a new calibration
system for calibrating the linearity error of an angle sensor under
in situ conditions without the need for accurate reference
instruments. To achieve accuracy in the nanoradian (nrad)
order, we elongated the critical-angle prism to increase the
sensitivity, and we added a thermal controller to the angle
sensor. This served to suppress thermal drift of the light source
to improve stability. The proposed angle sensor demonstrated a
stability of 3 nrad over 1 min, and the maximum repeatability error of
the calibration curve determined by the in situ
self-calibration method was approximately 35 nrad with a measurement
range of 500 μrad.
© 1998 Optical Society of America
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