Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance

Not Accessible

Your library or personal account may give you access

Abstract

Grazing-incidence specular reflectance and near-specular scattering were measured at Al-Kα (1.486-keV, 8.34-Å) radiation on uncoated dielectric substrates whose surface topography had been measured with a scanning probe microscope and a mechanical profiler. Grazing-incidence specular reflectance was also measured on selected substrates at the Cu–Kα (8.047-keV, 1.54-Å) wavelength. Substrates included superpolished and conventionally polished fused silica; SiO2 wafers; superpolished and precision-ground Zerodur; conventionally polished, float-polished, and precision-ground BK-7 glass; and superpolished and precision-ground silicon carbide. Roughnesses derived from x-ray specular reflectance and scattering measurements were in good agreement with topographic roughness values measured with a scanning probe microscope (atomic force microscope) and a mechanical profiler that included similar ranges of surface spatial wavelengths. The specular reflectance was also found to be sensitive to the density of polished surface layers and subsurface damage down to the penetration depth of the x rays. Density gradients and subsurface damage were found in the superpolished fused-silica and precision-ground Zerodur samples. These results suggest that one can nondestructively evaluate subsurface damage in transparent materials using grazing-incidence x-ray specular reflectance in the 1.5–8-keV range.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Reflection of X-rays from a rough surface at extremely small grazing angles

Mingwu Wen, Igor V. Kozhevnikov, and Zhanshan Wang
Opt. Express 23(19) 24220-24235 (2015)

Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors

H.-J. Stock, F. Hamelmann, U. Kleineberg, D. Menke, B. Schmiedeskamp, K. Osterried, K. F. Heidemann, and U. Heinzmann
Appl. Opt. 36(7) 1650-1654 (1997)

Surface roughness of stainless-steel mirrors for focusing soft x rays

Valeriy V. Yashchuk, Eric M. Gullikson, Malcolm R. Howells, Steve C. Irick, Alastair A. MacDowell, Wayne R. McKinney, Farhad Salmassi, Tony Warwick, James P. Metz, and Thomas W. Tonnessen
Appl. Opt. 45(20) 4833-4842 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (20)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved