Abstract

Thin-film interference effects were observed in the normal-incidence efficiency of a 2400-groove/mm replica grating. The efficiency was measured in the 100–350-Å wavelength range and had an oscillatory behavior that resulted from the presence of a thin SiO₂ coating. The thicknesses of the SiO₂ and the underlying oxidized aluminum layers were inferred from computer modeling of the zero-order efficiency. The efficiencies in the diffracted orders were calculated with the modified integral approach and accounting for the multilayer coating and the groove profile derived from atomic force microscopy. The calculated and measured efficiencies were in good agreement.

© 1999 Optical Society of America

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125–225-Å wavelength range

M. P. Kowalski, J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife
Appl. Opt. 36(34) 8939-8943 (1997)

High-efficiency MoRu–Be multilayer-coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range

John F. Seely, Claude Montcalm, Sherry Baker, and Saša Bajt
Appl. Opt. 40(31) 5565-5574 (2001)

Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements

Leonid I. Goray and John F. Seely
Appl. Opt. 41(7) 1434-1445 (2002)