Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Nonlinear absorption of thin Al2O3 films at 193 nm

Not Accessible

Your library or personal account may give you access

Abstract

Absorption of thin Al2O3 films was measured at 193 nm with an ArF-laser calorimeter. In addition to the expected high linear absorption coefficient, we found, for the first time to our knowledge, that two-photon absorption and transient color-center formation are nonnegligible loss channels in thin films at 193 nm. The nonlinear absorption coefficient is of the order of several times 10-4 cm/W.

© 2000 Optical Society of America

Full Article  |  PDF Article
More Like This
Nonlinear absorption in single LaF3 and MgF2 layers at 193 nm measured by surface sensitive laser induced deflection technique

Christian Mühlig, Simon Bublitz, and Siegfried Kufert
Appl. Opt. 48(35) 6781-6787 (2009)

Vacuum ultraviolet thin films. 1: Optical constants of BaF2, CaF2, LaF3, MgF2, Al2O3, HfO2, and SiO2 thin films

Muamer Zukic, Douglas G. Torr, James F. Spann, and Marsha R. Torr
Appl. Opt. 29(28) 4284-4292 (1990)

Microstructure-related properties at 193 nm of MgF2 and GdF3 films deposited by a resistive-heating boat

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 45(7) 1368-1374 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (16)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved