Bernhard von Blanckenhagen, Diana Tonova, and Jens Ullmann, "Application of the Tauc-Lorentz formulation to the interband absorption of optical coating materials," Appl. Opt. 41, 3137-3141 (2002)
Recent progress in ellipsometry instrumentation permits precise measurement and characterization of optical coating materials in the deep-UV wavelength range. Dielectric coating materials exhibit their first electronic interband transition in this spectral range. The Tauc-Lorentz model is a powerful tool with which to parameterize interband absorption above the band edge. The application of this model for the parameterization of the optical absorption of TiO2, Ta2O5, HfO2, Al2O3, and LaF3 thin-film materials is described.
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Bandgap energy, thickness, and surface roughness as obtained for various thin-film materials under investigation by use of the Tauc-Lorentz parameterization. Owing to limitations in the measured spectral range, no unambiguous value for the Eg of LaF3 was obtained (see text).
Table 3
Bandgap of TiO2 Reported in Several Publications
Eg (eV)
Deposition Technique
Characterization Method and Data Analysis Approach
Bandgap energy, thickness, and surface roughness as obtained for various thin-film materials under investigation by use of the Tauc-Lorentz parameterization. Owing to limitations in the measured spectral range, no unambiguous value for the Eg of LaF3 was obtained (see text).
Table 3
Bandgap of TiO2 Reported in Several Publications
Eg (eV)
Deposition Technique
Characterization Method and Data Analysis Approach
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