Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Measurement of the influence of dispersion on white-light interferometry

Not Accessible

Your library or personal account may give you access

Abstract

White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results.

© 2004 Optical Society of America

Full Article  |  PDF Article
More Like This
Dispersion measurements with white-light interferometry

Scott Diddams and Jean-Claude Diels
J. Opt. Soc. Am. B 13(6) 1120-1129 (1996)

Dispersion measurements of water with white-light interferometry

Amelia G. Van Engen, Scott A. Diddams, and Tracy S. Clement
Appl. Opt. 37(24) 5679-5686 (1998)

Theoretical measurement uncertainty of white-light interferometry on rough surfaces

Pavel Pavliček and Jan Soubusta
Appl. Opt. 42(10) 1809-1813 (2003)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved