Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Three-flat test solutions based on simple mirror symmetry

Not Accessible

Your library or personal account may give you access

Abstract

In interferometric surface and wavefront metrology, three-flat tests are the archetypes of measurement procedures to separate errors in the interferometer reference wavefront from errors due to the test part surface, so-called absolute tests. What is believed to be a new class of solutions of the three-flat problem for circular flats is described in terms of functions that are symmetric or antisymmetric with respect to reflections at a single line passing through the center of the flat surfaces. The new solutions are simpler and easier to calculate than the known solutions based on twofold mirror symmetry or rotation symmetry. Strategies for effective azimuthal averaging and a method for determining the averaging error are also discussed.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Pixel-based absolute topography test for three flats

Robert E. Parks, Lianzhen Shao, and Chris J. Evans
Appl. Opt. 37(25) 5951-5956 (1998)

Method for absolute flatness measurement of optical surfaces

Chen Xu, Lei Chen, and Jiayi Yin
Appl. Opt. 48(13) 2536-2541 (2009)

Absolute surface metrology by rotational averaging in oblique incidence interferometry

Weihao Lin, Yumei He, Li Song, Hongxin Luo, and Jie Wang
Appl. Opt. 53(16) 3370-3378 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (44)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved