Abstract
A design of a two-reflection mirror for nested grazing-incidence optics is proposed in which maximum overall reflectivity is achieved by making the two grazing-incidence angles equal for each ray. The design is proposed mainly for application to nonimaging collector optics for extreme-ultraviolet microlithography where the radiation emitted from a hot plasma source needs to be collected and focused on the illuminator optics. For completeness, the design of a double- reflection mirror with equal reflection angles is also briefly outlined for the case of an object at infinity for possible use in x-ray applications.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Huatan Qiu, Shailendra N. Srivastava, Keith C. Thompson, Martin J. Neumann, and David N. Ruzic
Appl. Opt. 47(13) 2443-2451 (2008)
Kwon Su Chon, Yoshiharu Namba, and Kwon-Ha Yoon
Appl. Opt. 45(19) 4609-4616 (2006)
Bernhard Lüttgenau, Dieter Panitzek, Serhiy Danylyuk, Sascha Brose, Jochen Stollenwerk, Peter Loosen, and Carlo Holly
Appl. Opt. 61(11) 3026-3033 (2022)