Abstract

Narrowband SiC∕Tb and Si∕Tb multilayers are fabricated with as much as a $23\%$ normal-incidence reflectance near a $60\text{\hspace{0.17em} nm}$ wavelength and spectral bandpass (FWHM) values of 9.4 and $6.5\text{\hspace{0.17em} nm}$, respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as $300°\text{C}$. Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si∕Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near $63.0\text{\hspace{0.17em} nm}$ and Mg x near $61.0\text{\hspace{0.17em} nm}$. We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.

© 2006 Optical Society of America

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