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Design of error-compensating algorithms for sinusoidal phase shifting interferometry

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Abstract

An improved approach to interferometry using sinusoidal phase shifting balances several harmonic components in the interference signal against each other. The resulting computationally efficient phase- estimation algorithms have low sensitivity to errors such as spurious intensity noise, vibration, and errors in the phase shift pattern. Specific example algorithms employing 8 and 12 camera frames illustrate design principles that are extendable to algorithms of any length for applications that would benefit from a simplified, sinusoidal phase shift.

© 2009 Optical Society of America

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