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Mixed oxide coatings for optics

Olaf Stenzel, Steffen Wilbrandt, Mark Schürmann, Norbert Kaiser, Henrik Ehlers, Mathias Mende, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Markus Stolze, Mario Held, Hansjörg Niederwald, Thomas Koch, Werner Riggers, Peer Burdack, Günter Mark, Rolf Schäfer, Stefan Mewes, Martin Bischoff, Markus Arntzen, Frank Eisenkrämer, Marc Lappschies, Stefan Jakobs, Stephan Koch, Beate Baumgarten, and Andreas Tünnermann

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Abstract

Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mech anical stress. The first high reflectors for UV applications have been deposited by PIAD.

© 2010 Optical Society of America

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