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Application of the Concept of Effective Refractive Index to the Measurement of Thickness Distributions of Dielectric Films

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Abstract

In the method to be described, the dielectric film is deposited between two silver films so that the three-layer system constitutes a Fabry–Perot interference filter. It is shown how measurements of the variation of the wavelength of peak transmittance over the surface of the filter can be combined with a measurement of the effective refractive index to obtain precise values of the distribution of relative geometrical thickness of the dielectric spacing layer.

© 1967 Optical Society of America

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