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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 1,
  • Issue 7,
  • pp. 420-422
  • (2003)

Readout of super-resolution marks with Ti thin film

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Abstract

Using Ti as the super-resolution reflective film to replace the Al reflective layer in conventional read-only optical disk, the recording marks with a diameter of 380 nm and a depth of 50 nm are read out in a dynamic testing device whose laser wavelength is 632.8 nm and numerical aperture of the lens is 0.40. The optimum Ti thin film thickness is 18 nm and the corresponding signal-noise-ratio is 32 dB.

© 2005 Chinese Optics Letters

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