Abstract
The direct replication of W/Si supermirrors is investigated systematically.
W/Si supermirrors are fabricated by direct current (DC) magnetron sputtering
technology. After deposition, the supermirrors are replicated from the supersmooth
mandrels onto ordinary °oat glass substrates by epoxy replication technique. The
properties of the supermirrors before and after the replication are characterized by
grazing incidence X-ray reflectometry (GIXR) measurement and atomic force microscope
(AFM). The results show that before and after replication, the multilayer structures
are almost the same and that the surface roughness is 0.240 and 0.217 nm,
respectively, which are close to that of the mandrel. It is demonstrated that the
W/Si supermirrors are successfully replicated from the mandrel with good
performance.
© 2011 Chinese Optics Letters
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