Abstract
In the spectral range 0.5<hv<11.9 eV, reflectance data were obtained from molybdenum and ruthenium films, vapor deposited in ultra-high vacuum and extended to 14 eV using the reflectance of a polished bulk sample. The Mo data are different from previously reported data. The optical constants are obtained by a Kramers–Kronig analysis of the normal-incidence reflectance. In the analysis for hv>14 eV (23 eV for Mo) the reflectance was represented by an inverse power function where the exponent was determined with the aid of the reflectance measured at 50° incidence for hv<11.9 eV. The imaginary part of the dielectric constant, ∊2, has shoulders at about 2.2 and 4.0 eV for Mo and 1.6 eV for Ru. The loss functions Im[1/∊] and Im [1/(1+∊)] have peaks at 10.8 and 9.9 eV, respectively, for Mo, and 10.2 and 8.7 eV, respectively, for Ru. Interband transitions dominate for 0.5≲hv≲10.0 eV.
© 1970 Optical Society of America
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