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Bimorph piezoelectric flexible mirror

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Abstract

We describe a flexible mirror constructed from plates of glass and lead zirconium titanate (PZT) piezoelectric ceramic glued together. It is activated by a series of electrodes on the reverse side. An equation of state is derived, giving the surface profile as a function of the electrode voltages, and the experimental behavior of the mirror is illustrated.

© 1979 Optical Society of America

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Piezoelectric bimorph optical beam scanners: analysis and construction

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Figures (3)

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Equations (14)

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