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Immersion spectroscopic reflectometry of multilayer systems. I. Theory

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Abstract

In this paper general rules for the spectral dependences of Fresnel coefficients and reflectances of multilayer systems in different transparent ambients are presented. These rules imply some limitations on the optical analysis of the multilayer systems that are summarized in this paper. The theoretical results are applied to some procedures that can be used in the analysis of nonabsorbing multilayer systems.

© 1988 Optical Society of America

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Equations (45)

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