Detour-phase kinoform interconnects: the concept and fabrication considerations

Jari Turunen; Juha Fagerholm; Antti Vasara; Mohammad R. Taghizadeh

doi:10.1364/JOSAA.7.001202

Journal of the Optical Society of America A
Vol. 7,
Issue 7,
pp. 1202-1208
(1990)
•https://doi.org/10.1364/JOSAA.7.001202

Detour-phase kinoform interconnects: the concept and fabrication considerations

Jari Turunen, Juha Fagerholm, Antti Vasara, and Mohammad R. Taghizadeh

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Jari Turunen, Juha Fagerholm, Antti Vasara, and Mohammad R. Taghizadeh, "Detour-phase kinoform interconnects: the concept and fabrication considerations," J. Opt. Soc. Am. A 7, 1202-1208 (1990)

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Abstract

The concept of detour phase in computer-generated holography is generalized here to specify K-level phasetransmission functions that approximate optimized, periodic Fourier-transform-type carrier-frequency kinoforms. Combined with standard microlithographic techniques, this concept is shown to open up a possibility of generating (using K = 8) fully arbitrary space-invariant holographic interconnects characterized by negligible reconstruction error (<2%) and high diffraction efficiency (75–95%) into the desired pattern.

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θ_l	Number of Cells L in One Grating Period

	L = 10	L = 15	L = 20
1	2.46612	1.68980	2.83861
2	0.43505	3.98160	1.61521
3	4.44938	3.91562	0.86861
4	5.63199	2.60415	6.00668
5	5.68391	1.92756	5.48372
6	4.40026	1.76235	5.87712
7	0.46566	1.93242	0.37865
8	2.50537	2.62009	0.30729
9	4.36711	3.93672	5.77698
10	4.38791	3.96958	5.49308
11		1.65659	6.16303
12		1.12758	1.01752
13		5.58997	1.74818
14		5.57694	3.03154
15		1.13235	3.87907
16			4.72964
17			5.68403
18			5.60142
19			4.56547
20			3.78184
ΔR	0.95%	0.15%	0.21%
P_E	77.9%	89.3%	93.7%

K	Q = 1	Q = 2	Q = 4	Q = 8
L = 10
2	37.5	16.3	8.07	4.23
4	5.04	2.95	1.91	1.40
8	2.01	1.42	1.14	1.01
16	1.04	0.98	0.96	0.96
L = 15
2	25.7	12.3	6.05	3.04
4	4.14	2.09	1.09	0.59
8	0.69	0.38	0.23	0.16
16	0.26	0.17	0.15	0.15
L = 20
2	13.0	6.54	3.35	1.78
4	1.92	1.07	0.64	0.43
8	0.81	0.49	0.33	0.25
16	0.29	0.23	0.22	0.22

θ_l	Number of Cells L in One Grating Period

	L = 10	L = 15	L = 20
1	2.46612	1.68980	2.83861
2	0.43505	3.98160	1.61521
3	4.44938	3.91562	0.86861
4	5.63199	2.60415	6.00668
5	5.68391	1.92756	5.48372
6	4.40026	1.76235	5.87712
7	0.46566	1.93242	0.37865
8	2.50537	2.62009	0.30729
9	4.36711	3.93672	5.77698
10	4.38791	3.96958	5.49308
11		1.65659	6.16303
12		1.12758	1.01752
13		5.58997	1.74818
14		5.57694	3.03154
15		1.13235	3.87907
16			4.72964
17			5.68403
18			5.60142
19			4.56547
20			3.78184
ΔR	0.95%	0.15%	0.21%
P_E	77.9%	89.3%	93.7%

K	Q = 1	Q = 2	Q = 4	Q = 8
L = 10
2	37.5	16.3	8.07	4.23
4	5.04	2.95	1.91	1.40
8	2.01	1.42	1.14	1.01
16	1.04	0.98	0.96	0.96
L = 15
2	25.7	12.3	6.05	3.04
4	4.14	2.09	1.09	0.59
8	0.69	0.38	0.23	0.16
16	0.26	0.17	0.15	0.15
L = 20
2	13.0	6.54	3.35	1.78
4	1.92	1.07	0.64	0.43
8	0.81	0.49	0.33	0.25
16	0.29	0.23	0.22	0.22

Abstract

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Figures (4)

Tables (2)

Equations (25)

Journal of the Optical Society of America A