Abstract

We have identified intense extreme-ultraviolet emission spectra within the 5–20-nm wavelength region, originating from transitions in the ${\mathrm{Xe}}^{8+},$ ${\mathrm{Xe}}^{9+},$ ${\mathrm{Xe}}^{10+},$ and ${\mathrm{Xe}}^{11+}$ ion species, which were generated in high-current pulsed capillary discharges operating with xenon gas. We have also obtained a time-dependent estimate of the plasma electron temperature for these plasmas at peak pulsed current densities in the range of 400–800 kA/cm².

© 2000 Optical Society of America

Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region

M. A. Klosner and W. T. Silfvast
Opt. Lett. 23(20) 1609-1611 (1998)

High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm

Marc A. Klosner and William T. Silfvast
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Guiding of high-intensity picosecond laser pulses in a discharge-ablated capillary waveguide

S. M. Hooker, D. J. Spence, and R. A. Smith
J. Opt. Soc. Am. B 17(1) 90-98 (2000)

Gas-filled capillary discharge waveguides

D. J. Spence, A. Butler, and S. M. Hooker
J. Opt. Soc. Am. B 20(1) 138-151 (2003)

Intense plasma discharge source at 13.5 nm for extreme-ultraviolet lithography

M. A. Klosner, H. A. Bender, W. T. Silfvast, and J. J. Rocca
Opt. Lett. 22(1) 34-36 (1997)