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Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry

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Abstract

Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.

© 1987 Optical Society of America

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