Abstract
We present a defect-enhancement system capable of detecting submicrometer defects on opaque periodic structures using real-time holography in photorefractive crystals. We detect 0.5-μm defects with ~90% success rate and 0.3-μm defects with >85% success rate while inspecting an area greater than 1 mm2 in real time. To our knowledge, these defects have an area 100 times smaller than those previously detected with any real-time holographic technique.
© 1992 Optical Society of America
Full Article | PDF ArticleMore Like This
Craig Uhrich and Lambertus Hesselink
Appl. Opt. 33(5) 744-757 (1994)
Ellen Ochoa, Joseph W. Goodman, and Lambertus Hesselink
Opt. Lett. 10(9) 430-432 (1985)
Craig Uhrich and Lambertus Hesselink
Appl. Opt. 27(21) 4497-4503 (1988)