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AlGaAs/GaAs/AlGaAs thin-film Fabry–Perot modulator on a glass substrate by using alignable epitaxial lift-off

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Abstract

We describe the fabrication and operation of a novel surface-normal AlGaAs/GaAs/AlGaAs p-i-n Fabry–Perot optical modulator on glass. The thin-film devices were separated from the GaAs growth substrate and deposited onto a glass substrate by an alignable epitaxial lift-off technique. Optical transmission measurements on these structures show a 3-dB contrast ratio over a 1.7-nm bandwidth with a maximum modulation of 3.3 dB at 878 nm, the largest contrast ratio reported to date to our knowledge for a surface-normal, double-heterostructure Franz–Keldysh modulator.

© 1993 Optical Society of America

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