Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Annealing effect on ion-beam-sputtered titanium dioxide film

Not Accessible

Your library or personal account may give you access

Abstract

We found that the extinction coefficient of ion-beam-sputtered titanium dioxide films first decreased with increasing annealing temperature then increased drastically when annealing temperature was increased above 200 °C for 24 h of annealing time. The decreasing extinction coefficient with annealing temperature was attributed to a reduction in absorption owing to oxidation of the film by annealing. The film structure remained amorphous to 200 °C annealing temperature. The drastic increase of extinction coefficients above 200 °C was associated with the appearance of an anatase polycrystalline structure and was attributed to scattering by the polycrystalline structure. With shorter annealing time the transition temperature from amorphous to polycrystalline anatase was higher. Guidance for reducing the optical loss of laser mirrors is proposed.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films

Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang
J. Opt. Soc. Am. A 16(6) 1477-1483 (1999)

Low-loss dielectric mirror with ion-beam-sputtered TiO2–SiO2 mixed films

Shiuh Chao, Wen-Hsiang Wang, and Cheng-Chung Lee
Appl. Opt. 40(13) 2177-2182 (2001)

Single- and dual-ion-beam sputter deposition of titanium oxide films

Jin-Cherng Hsu and Cheng-Chung Lee
Appl. Opt. 37(7) 1171-1176 (1998)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved