Abstract

In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.

© 1999 Optical Society of America

Noninterferometric wide-field optical profilometry with nanometer depth resolution

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