Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

157-nm coherent light source as an inspection tool for F2 laser lithography

Not Accessible

Your library or personal account may give you access

Abstract

We have developed a 157-nm coherent light source by two-photon resonant four-wave mixing in Xe, with two tunable single-mode 1-kHz Ti:sapphire laser systems at 768 and 681 nm. This light source has been developed to determine the instrumental function of a vacuum ultraviolet spectrometer and to evaluate optical designs for ultra-line-narrowed F2 laser lithography. The spectral linewidth of the source was less than 0.008 pm (FWHM), with an average power of 0.6 mW.

© 2002 Optical Society of America

Full Article  |  PDF Article
More Like This
Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system

T. Togashi, N. Nabekawa, T. Sekikawa, and S. Watanabe
Opt. Lett. 26(11) 831-833 (2001)

Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet

Chuangtian Chen, Junhua Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Zuyan Xu, and Jiyang Wang
Opt. Lett. 27(8) 637-639 (2002)

Metrology of pulsed radiation for 157-nm lithography

Mathias Richter, Udo Kroth, Alexander Gottwald, Christopher Gerth, Kai Tiedtke, Terubumi Saito, Ivan Tassy, and Klaus Vogler
Appl. Opt. 41(34) 7167-7172 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved