Abstract
We have fabricated multilayers having periods in the range and measured their soft-x-ray performance near normal incidence in the wavelength range . By adjusting the fractional layer thickness of W we have produced structures having interface widths (i.e., as determined from normal-incidence reflectometry), thus having optimal soft-x-ray performance. We describe our results and discuss their implications, particularly with regard to the development of short-wavelength normal-incidence x-ray optics.
© 2002 Optical Society of America
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