Abstract

A compact and monolithic four-channel demultiplexer with 20-nm spacing was fabricated by use of a high-spatial-frequency transmission grating buried in a silica waveguide. The grating was successfully buried in a silica slab waveguide by overcladding by plasma-enhanced chemical-vapor deposition. The device’s size was approximately $5.1 \mathrm{mm}\times 9.2 \mathrm{mm}$. The average insertion loss was 13 dB. The average cross talk was $-15 \mathrm{dB}$ for adjacent channels and $-19 \mathrm{dB}$ for nonadjacent channels. The polarization-dependent loss was estimated to be as low as 0.7 dB.

© 2004 Optical Society of America

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