Abstract
We investigated a microfabrication process for optical gratings with periods of micrometer order that use ultrafast laser pulses in semiconductor-doped glass. ZnS- or PbS-doped glass was prepared by a melting method. Glass transmission diffraction gratings with a high refractive-index difference were fabricated with femtosecond laser pulses. The first-order diffraction efficiencies of these gratings were approximately 80%, and the first-order diffraction angles of these gratings were 8° at telecommunication wavelengths.
© 2005 Optical Society of America
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