Abstract

Multiple-wavelength optical fields on a detecting plane of an interferometer are generated from the interference signals detected for an object surface. The generated optical fields are backpropagated along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The intensity and phase distributions of the reconstructed optical field provide the position of the object surface with an accuracy of a few nanometers.

© 2007 Optical Society of America

Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement

Hai Huan, Osami Sasaki, and Takamasa Suzuki
Appl. Opt. 46(29) 7268-7274 (2007)

Profile measurement of glass sheet using multiple wavelength backpropagation interferometry

Samuel Choi, Kohei Otsuki, Osami Sasaki, and Takamasa Suzuki
Appl. Opt. 52(16) 3726-3731 (2013)

Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement

Osami Sasaki, Norihiko Murata, and Takamasa Suzuki
Appl. Opt. 39(25) 4589-4592 (2000)

Superluminescent diode interferometer using sinusoidal phase modulation for step-profile measurement

Osami Sasaki, Yoshihiro Ikeada, and Takamasa Suzuki
Appl. Opt. 37(22) 5126-5131 (1998)

Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film

Hisashi Akiyama, Osami Sasaki, and Takamasa Suzuki
Opt. Express 13(25) 10066-10074 (2005)